Nonvolatile memory device and method of programming in the same

ABSTRACT

In a method of programming in a nonvolatile memory device including a memory cell region including a first metal pad and a peripheral circuit region including a second metal pad, wherein the peripheral circuit region is vertically connected to the memory cell region by the first metal pad and the second metal pad, a memory block in the memory cell region including a plurality of stacks disposed in a vertical direction is provided where the memory block includes cell strings each of which includes memory cells connected in series in the vertical direction between a source line and each of bitlines. A plurality of intermediate switching transistors disposed in a boundary portion between two adjacent stacks in the vertical direction is provided, where the intermediate switching transistors perform a switching operation to control electrical connection of the cell strings, respectively. A boosting operation is performed to boost voltages of channels of the plurality of stacks while controlling the switching operation of the intermediate switching transistors during a program operation with respect to the memory block. Program voltage disturbance and pass voltage disturbance are reduced through control of the switching operation of the intermediate switching transistors.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.17/007,767 filed on Aug. 31, 2020, which is a continuation-in-partapplication of U.S. application Ser. No. 16/393,377 filed on Apr. 24,2019, which claims priority from Korean Patent Application No.10-2018-0135905, filed on Nov. 7, 2018, in the Korean IntellectualProperty Office, the disclosures of which are incorporated herein intheir entireties by reference.

BACKGROUND 1. Technical Field

Apparatuses and methods consistent with example embodiments relate tosemiconductor integrated circuits, and more particularly to anonvolatile memory device and a method of programming in a nonvolatilememory device.

2. Discussion of the Related Art

Nonvolatile memory devices may maintain stored data even though power isoff. While volatile memory devices are used as main memories of variousapparatuses, nonvolatile memory devices are used for storing programcodes and/or data in various electronic devices, such as computers,mobile devices, etc.

Recently, nonvolatile memory devices of three-dimensional structure suchas vertical NAND memory devices have been developed to increaseintegration degree and memory capacity of the nonvolatile memorydevices. Along with increases in the integration degree and memorycapacity, disturbance on memory cells increases while the memory cellsare programmed.

SUMMARY

Various example embodiments provide a method of programming in anonvolatile memory device capable of reducing disturbance on memorycells during a program operation.

The embodiments also provide a nonvolatile memory device capable ofreducing disturbance on memory cells during a program operation.

According to an aspect of example embodiments, there is provided amethod of programming in a nonvolatile memory device including a memorycell region including a first metal pad and a peripheral circuit regionincluding a second metal pad, wherein the peripheral circuit region isvertically connected to the memory cell region by the first metal padand the second metal pad. The method may include: providing a memoryblock in the memory cell region including a plurality of stacks disposedin a vertical direction, each memory block including a plurality of cellstrings, and each cell string comprising a plurality of memory cellsconnected in series in the vertical direction between a source line andeach of a plurality of bitlines; providing a plurality of intermediateswitching transistors disposed in a boundary portion between twoadjacent stacks in the vertical direction, the intermediate switchingtransistors performing a switching operation to control electricalconnection of the cell strings, respectively; and performing a boostingoperation to boost voltages of channels of the stacks while controllingthe switching operation of the intermediate switching transistors duringa program operation with respect to the memory block.

According to an aspect of example embodiments, there is provided anonvolatile memory device which may include: a memory cell regionincluding a first metal pad; a peripheral circuit region including asecond metal pad, wherein the peripheral circuit region is verticallyconnected to the memory cell region by the first metal pad and thesecond metal pad; a memory block in the memory cell region, the memoryblock including a plurality of stacks disposed in a vertical direction,each memory block includes a plurality of cell strings, each cell stringincludes a plurality of memory cells connected in series in the verticaldirection between a source line and each of a plurality of bitlines; aplurality of intermediate switching transistors disposed in a boundaryportion between two adjacent stacks in the vertical direction, theintermediate switching transistors performing a switching operation tocontrol electrical connection of the cell strings, respectively; and acontrol circuit in the peripheral circuit region, the control circuitconfigured to perform a boosting operation to boost voltages of channelsof the stacks while controlling the switching operation of theintermediate switching transistors during a program operation withrespect to the memory block.

The nonvolatile memory device and the method of programming in thenonvolatile memory device according to example embodiments may reduceprogram voltage disturbance and pass voltage disturbance, and thus, mayenhance performance and lifetime of the nonvolatile memory devicethrough control of the switching operation of the intermediate switchingtransistors to implement double boosting of the channel voltages.

BRIEF DESCRIPTION OF THE DRAWINGS

Example embodiments of the present disclosure will be more clearlyunderstood from the following detailed description taken in conjunctionwith the accompanying drawings.

FIG. 1 is a flow chart illustrating a method of programming in anonvolatile memory device, according to example embodiments.

FIG. 2 is a block diagram illustrating a memory system according toexample embodiments.

FIG. 3 is a block diagram illustrating an example embodiment of anonvolatile memory device included in the memory system of FIG. 2 .

FIG. 4 is a block diagram illustrating a memory cell array included inthe nonvolatile memory device of FIG. 3 .

FIG. 5 is a perspective view illustrating one of memory blocks of FIG. 4.

FIG. 6 is a circuit diagram illustrating an equivalent circuit of thememory block described with reference to FIG. 5 .

FIG. 7A is a circuit diagram illustrating a structure of a memory cellarray according to example embodiments.

FIGS. 7B and 7C are perspective views illustrating a memory blockcorresponding to a structure of FIG. 7A.

FIG. 8 is a cross-sectional view for describing an example embodiment ofa boundary portion included in a memory block according to exampleembodiments.

FIG. 9 is a circuit diagram illustrating a program bias condition of athree-dimensional flash memory device.

FIG. 10 is a diagram illustrating a first program scenario according toexample embodiments.

FIG. 11 is a timing diagram illustrating a program operation of a secondstack according to the first program scenario of FIG. 10 , according toexample embodiments.

FIG. 12A is a diagram for describing decrease in pass voltagedisturbance in a nonvolatile memory device, according to exampleembodiments.

FIG. 12B is a diagram for describing decrease in program voltagedisturbance of a nonvolatile memory device, according to exampleembodiments.

FIGS. 13A and 13B are diagrams for describing decreases in pass voltagedisturbance and program voltage disturbance in incremental step pulseprogramming (ISPP) of a nonvolatile memory device, according to exampleembodiments.

FIG. 14 is a diagram illustrating a hot carrier injection that may becaused by a programming method in a nonvolatile memory device.

FIGS. 15 and 16 are flow charts illustrating a method of programming ina nonvolatile memory device, according to example embodiments.

FIG. 17 is a timing diagram illustrating a program operation of a secondstack according to the first program scenario of FIG. 10 , according toexample embodiments.

FIG. 18 is a cross-sectional view illustrating a memory block dividedinto three stacks, according to example embodiments.

FIGS. 19A and 19B are diagrams illustrating a program operation withrespect to stacks of the memory cell array of FIG. 18 according to thefirst program scenario of FIG. 10 , according to example embodiments.

FIG. 20 is a diagram illustrating a second program scenario according toexample embodiments.

FIG. 21 is a timing diagram illustrating a program operation of a firststack according to the second program scenario of FIG. 20 , according toexample embodiments.

FIGS. 22A and 22B are diagrams illustrating example embodiments of amemory cell array included in a nonvolatile memory device.

FIG. 23 is a block diagram illustrating a solid state disk or solidstate drive (SSD) according to example embodiments.

FIG. 24 is a cross-sectional view of a nonvolatile memory deviceaccording to example embodiments.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The embodiments described herebelow are all exemplary, and thus, theinventive concept is not limited to these embodiments disclosed belowand may be realized in various other forms. Various embodiments will bedescribed more fully hereinafter with reference to the accompanyingdrawings, in which like numerals refer to like elements throughout.Repeated descriptions may be omitted.

It will be understood that when an element or layer is referred to asbeing “over,” “above,” “on,” “connected to” or “coupled to” anotherelement or layer, it can be directly over, above, on, connected orcoupled to the other element or layer or intervening elements or layersmay be present. In contrast, when an element is referred to as being“directly over,” “directly above,” “directly on,” “directly connectedto” or “directly coupled to” another element or layer, there are nointervening elements or layers present. As used herein, the term“and/or” includes any and all combinations of one or more of theassociated listed items.

Spatially relative terms, such as “beneath,” “below,” “lower,” “over,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element's or feature's relationship toanother element(s) or feature(s) as illustrated in the figures. It willbe understood that the spatially relative terms are intended toencompass different orientations of the device in use or operation inaddition to the orientation depicted in the figures. For example, if thedevice in the figures is turned over, elements described as “below” or“beneath” other elements or features would then be oriented “above” theother elements or features. Thus, the term “below” can encompass both anorientation of above and below. The device may be otherwise oriented(rotated 90 degrees or at other orientations) and the spatially relativedescriptors used herein interpreted accordingly.

FIG. 1 is a flow chart illustrating a method of programming in anonvolatile memory device according to embodiments.

Referring to FIG. 1 , a memory block including a plurality of stacksdisposed in a vertical direction is provided, wherein the memory blockincludes a plurality of cell strings, and each cell string includes aplurality of memory cells connected in series and disposed in thevertical direction between a source line and a plurality of bitlines(S100). The memory block or a memory cell array may be divided into twostacks as will be described below with reference to FIGS. 7A, 7B and 7C,three stacks as will be described below with reference to FIG. 18 , andin the same way four or more stacks.

A plurality of intermediate switching transistors disposed in a boundaryportion between two adjacent stacks in the vertical direction areprovided, wherein the plurality of intermediate switching transistorsperform a switching operation to control electrical connection of theplurality of cell strings, respectively (S200). In some embodiments, aswill be described below with reference to FIGS. 7A and 7B, the boundaryportion may correspond to one gate layer. In other embodiments, as willbe described below with reference to FIG. 7C, the boundary portion maycorrespond to two or more gate layers that are adjacent in the verticaldirection. In still other embodiments, as will be described below withreference to FIG. 18 , the boundary portion may correspond to two ormore gate layers that are spaced apart in the vertical direction. Here,the gate layers may be layers on which conductive materials 213 to 293in FIG. 5 are formed, that is, gate layers in which gate lines GTL1-GTL8in FIG. 6 are formed.

A boosting operation is performed to boost voltages of channels of theplurality of stacks while controlling the switching operation of theplurality of intermediate switching transistors during a programoperation (S300). The boosting operation according to the control of theswitching operation of the plurality of intermediate switchingtransistors will be described below with reference to FIG. 11 , and soon.

As the number of the wordlines formed in the gate layers stacked in thevertical direction is increased to grow the density of each memoryblock, pass voltage disturbance on the memory cells connected to theunselected wordlines during the program operation is increased. Alsoprogram voltage disturbance on memory cells connected to a selectedwordline but included in unselected cell strings is increased as thenumber of cell strings in each memory block is increased.

The nonvolatile memory device and the method of programming in thenonvolatile memory device according to embodiments may reduce programvoltage disturbance and pass voltage disturbance, and thus, may enhanceperformance and lifetime of the nonvolatile memory device throughcontrol of the switching operation of the intermediate switchingtransistors to implement double boosting of the channel voltages. Herethe double boosting indicates that the channel voltages of a selectedstack that is to be programmed is boosted twice by controlling theswitching operation of the intermediate switching transistors and timingof applying pass voltages to the respective stacks.

FIG. 2 is a block diagram illustrating a memory system according toembodiments.

Referring to FIG. 2 , a memory system 10 may include a memory controller20 and at least one memory device 30.

The memory device 30 may be a nonvolatile memory device as describedherein. The memory system 10 may include data storage media based on aflash memory such as a memory card, a universal serial bus (USB) memoryand a solid state drive (SSD).

The nonvolatile memory device 30 may perform a read operation, an eraseoperation, and a program operation or a write operation under control ofthe memory controller 20. The nonvolatile memory device 30 receives acommand CMD, an address ADDR and data DATA through input/output linesfrom the memory controller 20 for performing such operations. Inaddition, the nonvolatile memory device 30 receives a control signalCTRL through a control line from the memory controller 20. In addition,the nonvolatile memory device 30 receives a power PWR through a powerline from the memory controller 20.

FIG. 3 is a block diagram illustrating an embodiment of a nonvolatilememory device included in the memory system of FIG. 2 .

Referring to FIG. 3 , the nonvolatile memory device 30 includes a memorycell array 100, a page buffer circuit 410, a data input/output circuit420, an address decoder 430, a control circuit 450 and a voltagegenerator 460.

The memory cell array 100 may be coupled to the address decoder 430through a plurality of string selection lines SSL, a plurality ofwordlines WL, and a plurality of ground selection lines GSL. Inaddition, the memory cell array 100 may be coupled to the page buffercircuit 410 through a plurality of bitlines BL.

The memory cell array 100 may include a plurality of memory cellscoupled to the plurality of wordlines WL and the plurality of bitlinesBL. In some embodiments, the memory cell array 100 may be athree-dimensional memory cell array, which is formed on a substrate in athree-dimensional structure (or a vertical structure). In this case, thememory cell array 100 may include a plurality of NAND strings that arevertically oriented such that at least one memory cell is located overanother memory cell.

The control circuit 450 may receive a command (signal) CMD and anaddress (signal) ADDR from the memory controller 20. The control circuit450 may control erase, programming and read operations of thenonvolatile memory device 30 based on the command signal CMD and theaddress signal ADDR. An erasure operation may include performing asequence of erase loops, and a program operation may include performinga sequence of program loops. Each program loop may include a programoperation and a program verification operation. Each erase loop mayinclude an erase operation and an erase verification operation. The readoperation may include a normal read operation and a data recovery readoperation.

For example, the control circuit 450 may generate control signals CTL,which are used for controlling the voltage generator 460, generate apage buffer control signal PBC for controlling the page buffer circuit410, based on the command signal CMD, and generate a row address R_ADDRand a column address C_ADDR based on the address signal ADDR. Thecontrol circuit 450 may provide the row address R_ADDR to the addressdecoder 430 and provide the column address C_ADDR to the datainput/output circuit 420.

The address decoder 430 may be coupled to the memory cell array 100through the plurality of string selection lines SSL, the plurality ofwordlines WL, and the plurality of ground selection lines GSL. Duringthe program operation or the read operation, the address decoder 430 maydetermine one of the plurality of wordlines WL as a selected wordlineand determine the rest of the plurality of wordlines WL, except for theselected wordline, as unselected wordlines, based on the row addressR_ADDR.

In addition, during the program operation or the read operation, theaddress decoder 430 may determine one of the plurality of stringselection lines SSL as a selected string selection line, and determinethe rest of the plurality of string selection lines SSL except for theselected string selection line as unselected string selection linesbased on the row address R_ADDR.

The voltage generator 460 may generate wordline voltages VWL, which maybe needed for the operation of the memory cell array 100 of thenonvolatile memory device 30, based on the control signals CTL. Thevoltage generator 460 may receive the power PWR from the memorycontroller 20. The wordline voltages VWL may be applied to the pluralityof wordlines WL through the address decoder 430.

For example, during the program operation, the voltage generator 460 mayapply a program voltage to the selected wordline, and apply a programpass voltage to the unselected wordlines. In addition, during theprogram verification operation, the voltage generator 460 may apply aprogram verification voltage to the selected wordline, and apply averification pass voltage to the unselected wordlines. In addition,during the normal read operation, the voltage generator 460 may apply aread voltage to the selected wordline, and apply a read pass voltage tothe unselected wordlines.

The page buffer circuit 410 may be coupled to the memory cell array 100through the plurality of bitlines BL. The page buffer circuit 410 mayinclude a plurality of buffers. In some embodiments, each buffer may beconnected to one bitline. In other embodiments, each buffer may beconnected to two or more bitlines.

The page buffer circuit 410 may temporarily store data to be programmedin a selected page or data read out from the selected page of the memorycell array 100.

The data input/output circuit 420 may be coupled to the page buffercircuit 410 through data lines DL. During the program operation, thedata input/output circuit 420 may receive program data DATA receivedfrom the memory controller 20, and provide the program data DATA to thepage buffer circuit 410 based on the column address C_ADDR received fromthe control circuit 450. During the read operation, the datainput/output circuit 420 may provide read data DATA, having been readfrom the memory cell array 100 and stored in the page buffer circuit410, to the memory controller 20 based on the column address C_ADDRreceived from the control circuit 450.

The address decoder 430 may include a channel initializer CHI 432. Ingeneral, channel initialization is performed through the stringselection line SSL and the bitline BL connected to a cell string.However, when a memory cell adjacent to a string selection transistor isprogrammed first, the channel initialization or channel precharge maynot be performed through the string selection transistor and the bitlineSSL. The channel initializer 432 may determine a proper program orderand perform the channel initialization based on the program order. Forexample, the channel initializer 432 may determine time points ofapplying the voltages to the string selection line SSL, the groundselection line GSL and a common source line.

The control circuit 450 may include an address scramble selector ASS452. The address scramble selector 452 may store channel hole profileinformation about the cell strings included in the memory cell array100. The channel hole profile may be defined during the manufacturingstage of the nonvolatile memory device 30. The address scramble selector452 may select a wordline WL corresponding to a received address ADDRamong a plurality of wordlines WL based on the channel hole profileinformation. The address scramble indicates a method of mapping memorycells included in a cell string to the wordlines WL.

Hereinafter, a first direction D1 indicates a direction perpendicular toan upper surface of a semiconductor substrate, and a second direction D2and a third direction D3 indicate two directions parallel to the uppersurface of the semiconductor substrate. For example, the seconddirection D2 and the third direction D3 may be perpendicular to eachother. The first direction D1 may be referred to as a verticaldirection, the second direction D2 may be referred to as a row directionand the third direction D3 may be referred to as a column direction. Thedirection indicated by an arrow in figures and the opposite directionmay be considered as the same direction.

FIG. 4 is a block diagram illustrating a memory cell array included inthe nonvolatile memory device of FIG. 3 , and FIG. 5 is a perspectiveview illustrating one of memory blocks of FIG. 4 .

Referring to FIG. 4 , the memory cell array 100 may include a pluralityof memory blocks BLK1 to BLKz. In an embodiment, the memory blocks BLK1to BLKz are selected by the address decoder 430 in FIG. 3 . For example,the address decoder 430 may select a particular memory block BLKcorresponding to a block address among the memory blocks BLK1 to BLKz.

Referring to FIG. 5 , a memory block BLKi includes NAND strings or cellstrings which are formed on a substrate in a three-dimensional structure(or a vertical structure). The memory block BLKi includes structuresextending along the first, second and third directions D1, D2 and D3.

A substrate 111 is provided. For example, the substrate 111 may have awell of a first type (e.g., a first conductive type). For example, thesubstrate 111 may have a p-well formed by implanting a group 13 elementsuch as boron (B). For example, the substrate 111 may have a pocketp-well provided in an n-well. In an embodiment, the substrate 111 has ap-type well (or a p-type pocket well). However, the conductive type ofthe substrate 111 is not limited to the p-type.

A plurality of doping regions 311 to 314 extending along the seconddirection D2 are provided in/on the substrate 111. For example, theplurality of doping regions 311 to 314 may have a second type (e.g., asecond conductive type) different from the first type of the substrate111. In an embodiment, the first to fourth doping regions 311 to 314have an n-type. However, the conductive type of the first to fourthdoping regions 311 to 314 is not limited to the n-type.

A plurality of insulation materials 112 extending along the seconddirection D2 are sequentially provided along the first direction D1 on aregion of the substrate 111 between the first and second doping regions311 and 312. For example, the plurality of insulation materials 112 areprovided along the first direction D1, being spaced by a specificdistance. For example, the insulation materials 112 may include aninsulation material such as an oxide layer.

A plurality of pillars 113 penetrating the insulation materials alongthe first direction D1 are sequentially disposed along the seconddirection D2 and the third direction D3 on a region of the substrate111. For example, the plurality of pillars 113 penetrate the insulationmaterials 112 to contact the substrate 111.

For example, each pillar 113 may include a plurality of materials. Forexample, a channel layer 114 of each pillar 113 may include a siliconmaterial having a first type. For example, the channel layer 114 of eachpillar 113 may include a silicon material having the same type as thesubstrate 111. In an embodiment, the channel layer 114 of each pillar113 includes p-type silicon. However, the channel layer 114 of eachpillar 113 is not limited to the p-type silicon.

An internal material 115 of each pillar 113 includes an insulationmaterial. For example, the internal material 115 of each pillar 113 mayinclude an insulation material such as silicon oxide. In some examples,the inner material 115 of each pillar 113 may include an air gap.

An insulation layer 116 is provided along the exposed surfaces of theinsulation materials 112, the pillars 113, and the substrate 111, on aregion between the first and second doping regions 311 and 312.

A plurality of first conductive materials 211 to 291 are provided onsurfaces of the insulation layer 116, in a region between the first andsecond doping regions 311 and 312. For example, the first conductivematerial 211 extending along the second direction D2 is provided betweenthe insulation material 112 adjacent to the substrate 111 and thesubstrate 111. In more detail, the first conductive material 211extending along the second direction D2 is provided between theinsulation layer 116 at the bottom of the insulation material 112adjacent to the substrate 111 and the substrate 111.

A first conductive material extending along the second direction D2 isprovided between the insulation layer 116 at the top of a specificinsulation material among the insulation materials 112 and theinsulation layer 116 at the bottom of a specific insulation materialamong the insulation materials 112. For example, a plurality of firstconductive materials 221 to 281 extending along the second direction D2are provided between the insulation materials 112. and it may beunderstood that the insulation layer 116 is provided between theinsulation materials 112 and the first conductive materials 221 to 281.The first conductive materials 211 to 291 may be formed of a conductivemetal. In some examples, the first conductive materials 211 to 291 mayinclude a conductive material such as polysilicon.

The same structures as those on the first and second doping regions 311and 312 may be provided in a region between the second and third dopingregions 312 and 313. In the region between the second and third dopingregions 312 and 313, provided are a plurality of insulation materials112 extending along the second direction D2, a pillar 113 penetratingthe plurality of insulation materials 112 along the first direction D1,an insulation layer 116 provided on the exposed surfaces of theplurality of insulation materials 112 and the pillar 113, and aplurality of conductive materials 213 to 293 extending along the seconddirection D2.

Drains 320 are provided on the plurality of pillars 113, respectively.On the drains 320, second conductive materials 331 to 333 extendingalong the third direction D3 are provided. The second conductivematerials 331 to 333 are disposed along the second direction D2, beingspaced by a specific distance. The second conductive materials 331 to333 are respectively connected to the drains 320 in a correspondingregion. The drains 320 and the second conductive material 331 to 333extending along the third direction D3 may be connected through eachcontact plug. The second conductive materials 331 to 333 may includemetal materials. The second conductive materials 331 to 333 may includeconductive materials such as polysilicon.

The layers in which the first conductive materials are formed correspondto gate layers and the first conductive materials may form gate linessuch as a string selection line SSL, a wordline WL, intermediateswitching lines MSL, USL and LSL, a ground selection line GSL, etc. Thesecond conductive materials may form a bitline BL.

FIG. 6 is a circuit diagram illustrating an equivalent circuit of thememory block described with reference to FIG. 5 .

The memory block BLKi of FIG. 6 may be formed on a substrate in athree-dimensional structure (or a vertical structure). For example, aplurality of NAND strings or cell strings included in the memory blockBLKi may be formed in the first direction D1 perpendicular to the uppersurface of the substrate.

Referring to FIG. 6 , the memory block BLKi may include NAND stringsNS11 to NS33 coupled between bitlines BL1, BL2 and BL3 and a commonsource line CSL. Each of the NAND strings NS11 to NS33 may include astring selection transistor SST, a plurality of memory cells MC1 to MC8,and a ground selection transistor GST. In FIG. 6 , each of the NANDstrings NS11 to NS33 is illustrated to include eight memory cells MC1 toMC8. However, embodiments are not limited thereto. In some embodiments,each of the NAND strings NS11 to NS33 may include any number of memorycells.

Each string selection transistor SST may be connected to a correspondingstring selection line (one of SSL1 to SSL3). The plurality of memorycells MC1 to MC8 may be connected to corresponding gate lines GTL1 toGTL8, respectively. The gate lines GTL1 to GTL8 may be wordlines andsome of the gate lines GTL1 to GTL8 may be dummy wordlines. In addition,some of the gate lines GTL1 to GTL8 may be intermediate switching lines,and the memory cells connected to the intermediate switching lines maybe referred to as intermediate switching transistors or intermediateswitches. Each ground selection transistor GST may be connected to acorresponding ground selection line (one of GSL1 to GSL3). Each stringselection transistor SST may be connected to a corresponding bitline(e.g., one of BL1, BL2 and BL3), and each ground selection transistorGST may be connected to the common source line CSL.

Wordlines (e.g., WL1) having the same height may be commonly connected,and the ground selection lines GSL1 to GSL3 and the string selectionlines SSL1 to SSL3 may be separated. Even though not illustrated, thegate lines corresponding to the intermediate switching lines may beseparated as will be described below. In FIG. 6 , the memory block BLKiis illustrated to be coupled to eight gate lines GTL1 to GTL8 and threebitlines BL1 to BL3. However, embodiments are not limited thereto. Eachmemory block in the memory cell array 100 may be coupled to any numberof wordlines and any number of bitlines.

Hereinafter, the memory cells may be omitted and only the gate linesstacked in the vertical direction may be illustrated in figures of amemory block for convenience of illustration. The gate lines may includea string selection line SSL, a wordline WL, a dummy wordline DWL,intermediate switching lines MSL, USL and LSL and a ground selectionline GSL. The transistors driven by the intermediate switching linesMSL, USL and LSL may be referred to as intermediate switchingtransistors or intermediate switches. At least one of the intermediateswitching lines MSL, USL and LSL may be also a dummy wordline DWL, andat least one of the respectively connected intermediate switchingtransistors may be a dummy transistor which is not connected to thebitlines BL. For convenience of illustration and description, only two,three or four cell strings are connected to a same bitline BL infollowing figures. However, embodiments are not limited thereto, and thenumber of cell strings may be determined variously.

FIG. 7A is a circuit diagram illustrating a structure of a memory cellarray according to embodiments.

FIGS. 7B and 7C are perspective views illustrating a memory blockcorresponding to a structure of FIG. 7A.

FIG. 8A illustrates two-dimensional version of a memory block includingcell strings connected to one bitline BL and one source line CSL forconvenience of illustration, but it will be understood that the memoryblock may have a three-dimensional structure of a plurality of bitlinesas described with reference to FIGS. 5 and 6 .

Referring to FIGS. 7A and 7B, a memory block may include a plurality ofcell strings STR1-STRm connected between a bitline BL and a source lineCSL. The cell strings STR1-STRm may include two stacks ST1 and ST2, anda boundary portion BND therebetween. The cell strings STR1-STRm mayinclude string selection transistors SST1-SSTm controlled by stringselection lines SSL1-SSLm, memory cells controlled by wordlines WL,intermediate switching transistors MST1-MSTm controlled by anintermediate switching line MSL, and a ground selection transistorsGST1-GSTm controlled by a ground selection line GSL, respectively. Here,m is a natural number greater than 1. The intermediate switching lineMSL may be a dummy wordline DWL, and the intermediate switchingtransistors MST1-MSTm may be dummy transistors which are not connectedto the bitlines BL. The memory cells connected to wordlines disposed inend portions of the stacks ST1 and ST2 in the first direction D1 may bedummy cells.

FIG. 7A illustrates an embodiment that the ground selection transistorsGST1-GSTm are connected to the same ground selection line GSL. In otherembodiments, the ground selection transistors may be connected to therespective ground selection lines.

In some embodiments, as illustrated in FIGS. 7A and 7B, the boundaryportion BND may include one gate line MSL that switches or activatessimultaneously the intermediate switching transistors MST1-MSTmconnected thereto. In other embodiments, as illustrated in FIG. 7C, theboundary portion BND may include two gate lines MSL1 and MSL2 thatswitch simultaneously the intermediate switching transistors connectedthereto. Even though not illustrated in figures, the boundary portionBND may include three or more gate lines.

FIG. 8 is a cross-sectional view for describing an embodiment of aboundary portion included in a memory block according to embodiments.

Referring to FIG. 8 , a channel hole of each cell string STR may includea first sub channel hole 610 and a second sub channel hole 510. Achannel hole may be referred to as a pillar corresponding to the pillar113 shown in FIG. 5 . The first sub channel hole 610 may include achannel layer 611, an inner material 612 and an insulation layer 613.The second sub channel hole 510 may include a channel layer 511, aninner material 512 and an insulation layer 513. The channel layer 611 ofthe first channel hole 610 may be connected to the channel layer 511 ofthe second sub channel hole 510 through a P-type silicon pad SIP. Thesub channel holes 610 and 510 may be formed using a stopper line GTL5having an appropriate etch rate. For example, the stopper line GTL5 maybe formed of polysilicon and the other gate lines GTL1-GTL4 and theGTL6-GTL8 may be formed of metal such as tungsten to implement theappropriate etch rate.

The above-described boundary portion BND may correspond to the stopperlayer GTL5 that is used to form the plurality of sub channel holes. Thecells in the stopper layer GTL5 may be improper for storing data, andthe stopper layer may be used as the boundary portion BND to form theintermediate switching transistors. Embodiments are not limited to aboundary portion of one stopper layer, and the boundary portion mayinclude two or more gate layers.

FIG. 9 is a circuit diagram illustrating a program bias condition of athree-dimensional flash memory device.

For convenience of description, among a plurality of NAND strings of amemory block BLK, NAND strings NS11 and NS21 connected to a firstbitline BL1 and NAND strings NS12 and NS22 connected to a second bitlineBL2 are illustrated in FIG. 9 .

The first bitline BL1 may be a program bitline to which a programpermission voltage (e.g., 0 V) is applied, and the second bitline BL2may be a program inhibition bitline to which a program inhibitionvoltage such as a power supply voltage Vcc is applied. If the NANDstring NS21 among the NAND strings NS11 and NS21 is selected, during aprogram operation, a voltage of 0 V may be applied to a first stringselection line SSL1 (unselected string line), and the power supplyvoltage Vcc may be applied to a second string selection line SSL2(selected string line).

The voltage of 0 V may be applied to ground selection lines GSL1 andGSL2. Furthermore, a voltage (e.g., Vcc) higher than 0 V may be appliedto a common source line CSL. A program voltage VPGM (e.g., 18 V) may beapplied to a selected wordline (e.g., WL5) and a pass voltage VPASS(e.g., 8 V) may be applied to unselected wordlines (e.g., WL4 and WL6).

Under the program bias condition, a voltage of 18 V may be applied to agate of a memory cell A having a channel voltage of 0 V. Since a strongelectric field is formed between the gate and a channel of the memorycell A, the memory cell A may be programmed. Since, however, since achannel voltage of a memory cell B is Vcc, and a low electric field isformed between a gate and the channel, the memory cell B may not beprogrammed. Further, since respective channels of memory cells C and Dare in a floating state, channel voltages thereof may be boosted up to,for example, about 8 V, and thus, the memory cells C and D may not beprogrammed.

When the program voltage VPGM increases, the memory cell C of theunselected NAND string NS11 connected to the program permission bitlineBL1 may be stressed excessively to be programmed unintentionally, whichmay be referred as program voltage disturbance. In addition, when thepass voltage VPASS increases, the memory cells except the memory cell Aof the selected NAND string NS21 connected to the program permissionbitline BL1 may be stressed excessively to be programmedunintentionally, which may be referred as pass voltage disturbance.

FIG. 10 is a diagram illustrating a first program scenario according toembodiments.

FIG. 10 illustrates one cell string including a string selectiontransistor SST connected to a string selection line SSL, a groundselection transistor GST connected to a ground selection line GSL andmemory cells MC1-MC12 connected to wordlines WL1-WL12, and states ofmemory cells. The cell string is connected between a bitline BL and asource line CSL. FIG. 10 illustrates a non-limiting example of twelvememory cells and an MLC storing two bits.

Referring to FIG. 10 , according to a first program scenario, a programoperation may be performed in a downward direction from an uppermostwordline. In other words, as data stored in the memory block increase,data may be filled in erased cells in the downward direction from top tobottom (T2B program order). Non-programmed memory cells MC1-MC7 are inan erased state E0, and each of programmed memory cells MC8-MC12 may bein one of the erased state E0 and programmed states P1, P2 and P3. Forexample, at least one of the memory cells MC2-MC11 may be anintermediate switching transistor.

FIG. 11 is a timing diagram illustrating a program operation of a secondstack of a cell string according to the first program scenario of FIG.10 .

FIG. 11 illustrates a boosting operation of intermediate switchingtransistors when a selected wordline WLs corresponding to a programaddress is included in the second stack ST2. In other words, a firststack ST1 corresponds to an erased stack indicating a stack in which allmemory cells are in an erased state, and the second stack ST2corresponds to a selected stack indicating a stack that includes memorycells to be programmed.

Time interval T1-T2 is a precharge period PPC, time interval T2-T3 is afirst boosting period PBST1, time interval T3-T4 is a second boostingperiod PBST2 and time interval T4-T5 is a program execution period PEXEwhile a program voltage VPGM is applied to the selected wordline WLs.Hereinafter, a turn-on voltage and a turn-off voltage represent voltageof levels to turn on and off a corresponding transistor.

A program inhibition voltage VINH may be applied to the bitline BL whenit is a program inhibition bitline, and a program permission voltageVPER may be applied to bitline BL when it is a program permissionbitline.

During the precharge period PPC, a turn-off voltage VSOFF is applied toa selected string selection line SSLs and unselected string selectionline SSLu, a turn-on voltage VMON is applied to an intermediateswitching line MSL, and a turn-on voltage VGON is applied to a groundselection line GSL. Ground selection transistors and the intermediateswitching transistors are turned on, and thus, a precharge voltage VPCof the source line CSL is applied to the channels CH of the first stackST1 and the second stack ST2. As such, the precharge voltage VPC may beapplied to the channels of the first stack ST1 and the second stack ST2before performing the boosting operation of the first boosting periodPBST1 and the second boosting period PBST2. During the precharge periodPPC, an initialization voltage Vo may be applied to a selected wordlineWLs and unselected wordlines WLu. The initialization voltage Vo may havea voltage level capable of turning on the erased memory cells. Theprogrammed memory cells in the second stack ST2 are turned off, and thechannel portion between the bitline BL and the programmed memory cellmay be floated.

During the first boosting period PBST1, the intermediate switching lineMSL maintains the turn-on voltage VMON, a turn-off voltage VGOFF isapplied to the ground selection line GSL, and the channels of the firststack ST1 and the second stack ST2 are floated. A first pass voltageVPASS1 is applied to the wordlines WLu (ST1) of the first stack ST1corresponding to the erased stack while the intermediate switchingtransistors are turned on. As a result, the channels CH of the firststack ST1 and the second stack ST1 may be boosted to a first channelvoltage VCH1. The first channel voltage VCH1 may be representedapproximately as Equation 1 below.VCH1=VPC+VBST1=VPC+VPASS1*N1/[(N2−Np)+N1]  (1)

In Equation 1, VPC is the precharge voltage, VBST1 is a first bootedvoltage, N1 is the number of the wordlines of the first stack ST1, N2 isthe number of the wordlines of the second stack ST2, Np is the number ofthe wordlines corresponding to (or connected to) previously-programmedmemory cells, in the second stack ST2. As represented by Equation 1, thefirst boosted voltage VBST1 increases and the number Np increases.

During the second boosting period PBST2, a turn-on voltage VSON isapplied to the selected string selection line SSLs, a turn-off voltageVMOFF is applied to the intermediate switching line MSL, and thus, thefirst stack ST1 and the second stack ST2 are electrically disconnectedfrom each other. A second pass voltage VPASS2 is applied to thewordlines WLu (ST2) and WLs (ST2) of the second stack ST2 correspondingto the selected stack while the intermediate switching transistors areturned off. As a result, the channels CH of the first stack ST1 maymaintain the first channel voltage VCH1, and the channels of the secondstack ST2 may be further boosted to a second channel voltage VCH2. Eventhough not illustrated, the channels of the second stack ST2 in theselected cell string may have the program permission voltage VPER or theprogram inhibition voltage VINH according to the bitline voltage becausethe turn-on voltage VSON is applied to the selected string selectionline SSLs. The second channel voltage VCH2 may be representedapproximately as Equation 2.

$\begin{matrix}\begin{matrix}{{{VCH}\; 2} = {{{VCH}\; 1} + {{VBST}\; 2}}} \\{= {{VPC} + {{VBST}\; 1} + {{VBST}\; 2}}} \\{= {{VPC} + {{VPASS}\; 1*N\;{1\left\lbrack {\left( {{N\; 2} - {N\; p}} \right) + {N\; 1}} \right\rbrack}} + {{VPASS}\; 2}}}\end{matrix} & (2)\end{matrix}$

In Equation 2, VBST2 is a second booted voltage, and the second boostedvoltage VBST2 corresponds to the second pass voltage VPASS2.

After the precharge period PPC, a turn-off voltage VGOFF is applied tothe ground selection line GSL to electrically disconnect the cellstrings from the source line CSL.

During program execution period PEXE, a program voltage VPGM is appliedto the selected wordline WLs (ST2) of the second stack ST2 correspondingto the selected stack, and the selected memory cells connected to thebitlines BL to which the program permission voltage VPER is applied maybe programmed.

As such, the boosting operation according to embodiments may include thefirst boosting operation of the first boosting period PBST1 and thesecond boosting operation of the second boosting period PBST2, which maybe referred to as double boosting.

The first boosting operation may be performed such that the first passvoltage VPASS1 is applied to the wordlines of the erased stack ST1 amongthe plurality of stacks ST1 and ST2 while the plurality of intermediateswitching transistors are turned on by applying the turn-on voltage VMONto the intermediate switching line MSL during the first boosting periodPBST1. The second boosting operation may be performed such that, afterthe first pass voltage VPASS1 is applied to the wordlines of the erasedstack ST1, the second pass voltage VPASS2 is applied to the wordlines ofthe selected stack ST2 among the plurality of stacks ST1 and ST2 whilethe plurality of intermediate switching transistors are turned off byapplying the turn-off voltage VMOFF to the intermediate switching lineMSL during the second boosting period PBST2.

The channels of the erased stack ST1 and the channels of the selectedstack ST2 are electrically connected to each other by turning-on of theplurality of intermediate switching transistors while the first passvoltage VPASS1 is applied to the wordlines of the erased stack ST1during the first boosting period PBST1. In contrast, the channels of theerased stack ST1 and the channels of the selected stack ST2 areelectrically disconnected from each other by turning-off of theplurality of intermediate switching transistors while the second passvoltage VPASS2 is applied to the wordlines of the selected stack ST2during the second boosting period PBST2.

Accordingly, as represented by Equation 1 and Equation 2, the channelsof the erased stack ST1 and the channels of the selected stack ST2 areboosted to the first channel voltage VCH1 by the first boostingoperation, and only the channels of the selected stack ST2 are furtherboosted to the second channel voltage VCH2 by the second boostingoperation. At time point T4 when the second boosting operation iscompleted, the second channel voltage VCH2 of the selected stack ST2becomes higher than the first channel voltage VCH1 of the erased stackST1.

FIG. 12A is a diagram for describing decrease in pass voltagedisturbance in a nonvolatile memory device according to embodiments, andFIG. 12B is a diagram for describing decrease in program voltagedisturbance of a nonvolatile memory device according to embodiments.

FIGS. 12A and 12B illustrate a structure of a cell string connectedbetween a bitline BL and a source line CSL where the cell stringincludes a string selection transistor SST connected to a stringselection line SSL, a plurality of memory cells MC1-MC12 connected towordlines WL1-WL12, respectively, an intermediate switching transistorMST connected to an intermediate switching line MSL and a groundselection transistor GST connected to a ground selection line GSL, whichare disposed vertically. The left portions of FIGS. 12A and 12Billustrate cases according to a conventional scheme and the rightportion of FIGS. 12A and 12B illustrated cases according to embodiments.The cell string of FIGS. 12A and 12B is a selected cell string such thata turn-on voltage VSON is applied to the string selection line SSL. Afirst stack ST1 corresponds to an erased stack in which all memory cellsare in an erased state, and a second stack ST2 corresponds to a selectedstack that includes memory cells to be programmed presently.

FIG. 12A illustrates channel voltages of the cell string when a programpermission voltage VPER is applied to the bitline BL. In case of theconventional method, the turn-on voltage VMON is applied to theintermediate switching line MSL corresponding to a dummy wordline, theintermediate switching transistor MST is turned on, and thus, thechannel voltage VCHc of the erased stack ST1 becomes equal to thechannel voltage VCHc of the selected stack ST2. In this case, thevoltage difference between the channels and the gate electrodes of thememory cells MC1-MC6 of the erased stack ST1 is the pass voltage VPASS.In contrast, in case of double boosting according to embodiments, theturn-off voltage VMOFF is applied to the intermediate switching lineMSL, the intermediate switching transistor MST is turned off, and thus,the channels of the erased stack ST1 are boosted to the first channelvoltage VCH1. In this case, the voltage difference between the channelsand the gate electrodes of the memory cells MC1-MC6 of the erased stackST1 is VPASS1-VCH1. As a result, the pass voltage disturbance of theerased stack ST1 may be reduced or prevented by the double boostingaccording to embodiments.

FIG. 12B illustrates channel voltages of the cell string when a programinhibition voltage VINH is applied to the bitline BL. In case of theconventional method, the turn-on voltage VMON is applied to theintermediate switching line MSL corresponding to a dummy wordline, theintermediate switching transistor MST is turned on, and thus, thechannel voltage VCHc of the erased stack ST1 becomes equal to thechannel voltage VCHc of the selected stack ST2. In this case, thevoltage difference between the channel and the gate electrode of thememory cell MC9 to which the program voltage VPGM is VPGM-VCC-VPASS. Incontrast, in case of double boosting according to embodiments, theturn-off voltage VMOFF is applied to the intermediate switching lineMSL, and the intermediate switching transistor MST is turned off. Thusthe channels of the erased stack ST1 are boosted to the first channelvoltage VCH1, the channels of the erased memory cells MC7-MC9 of theselected stack ST2 are boosted to the second channel voltage VCH2, andthe channels of the programmed memory cells MC10-MC12 of the selectedstack ST2 are boosted to the third channel voltage VCH3. In this case,the voltage difference between the channel and the gate electrode of thememory cell MC9 to which the program voltage VPGM isVPGM-VCC-VBST-VPASS2. As a result, the program voltage disturbance ofthe memory cell MC9 to which the program voltage VPGM may be reduced orprevented by the double boosting according to embodiments.

FIGS. 13A and 13B are diagrams for describing decreases in pass voltagedisturbance and program voltage disturbance in incremental step pulseprogramming (ISPP) of a nonvolatile memory device according toembodiments.

FIG. 13A illustrates the ISPP by a conventional method, and FIG. 13Billustrates the ISPP by double boosting according to embodiments.Referring to FIGS. 13A and 13B, a plurality of program loops LOOP1-LOOP7may be sequentially performed until programming is completed accordingto the ISPP. As the program loops are repeated, the voltage level of theprogram voltage VPGM may be increased (e.g., from 15V to 21V), and alsothe second pass voltage VPASS2 may be increased.

In FIGS. 13A and 13B, the cases where the program voltage disturbance orthe pass voltage disturbance occurs are represented by YES, and thecases where the program voltage disturbance or the pass voltagedisturbance does not occur are represented by NO. In the case of FIG.13A, the program voltage disturbance occurs when VPGM-VPASS2 is equal toor greater than 9V, and the pass voltage disturbance occurs when VPASSis equal to or higher than 7V. In the case of FIG. 13B, the programvoltage disturbance occurs when VPGM-VPASS2-VBST is equal to or greaterthan 9V, and the pass voltage disturbance occurs when VPASS is equal toor higher than 7V. Here, VBST is the above-described boosted voltage andthe boosted voltage is assumed to be 2V.

As illustrated in FIGS. 13A and 13B, the pass voltage VPASS2 may belowered for the program loops where the program voltage disturbance doesnot occur using the double boosting according to embodiments, and thus,the number of the program loops where the pass voltage disturbanceoccurs may be reduced. In addition, the number of the program loopswhere the program voltage disturbance occurs may be reduced by theboosted voltage VBST.

FIG. 14 is a diagram illustrating a hot carrier injection that may becaused by a programming method in a nonvolatile memory device.

FIG. 14 illustrates a hot carrier injection HCI that may occur in theabove-described selected stack. As described above with reference toFIGS. 11, 12A and 12B, with respect to the selected stack, theinitialization voltage (e.g., 0V) may be applied to the wordlinesWL7-WL12 during the first boosting period PBST1, and the second passvoltage VPASS2 may be applied to the wordlines WL7-WL12 during thesecond boosting period PBST2. Because the memory cell in the programmedstate PS is turned off, the channels corresponding to the wordlinesWL10-WL12 to which the program operation was performed already may havethe third channel voltage VCH3, and the channels corresponding to thewordlines WL7-WL9 to which the program operation is not performed yetmay have the second channel voltage VCH2. As described with reference toEquation 1 and Equation 2, the second channel voltage VCH2 increases asthe number Np of the wordlines corresponding to previously-programmedmemory cells in the selected stack increases. In addition, as the numberNp increases, the boosting effect by the program voltage VPGM may beincreased, and the second channel voltage VCH2 may be increasedexcessively. If the difference between the second channel voltage VCH2and the third channel voltage VCH3 exceeds a threshold value, theprogrammed state PS of the memory cell in the boundary region may bedistorted by the hot carrier injection HCI. Accordingly the doubleboosting according to embodiments may be controlled as will be describedwith reference to FIGS. 15 and 16 .

FIGS. 15 and 16 are flow charts illustrating a method of programming ina nonvolatile memory device according to embodiments.

Referring to FIGS. 2, 3 and 15 , the nonvolatile memory device 30 mayreceive a programming (PGM) command (S11) and prepare a programoperation. The control circuit 450 of the nonvolatile memory device 30may determine a program line number Np corresponding to a number ofwordlines corresponding to previously-programmed memory cells in aselected stack (S12). The control circuit 450 may control a boostingoperation based on the program line number Np. For example, the controlcircuit 450 may compare the program line number Np with a predeterminedreference number Nr (S13). When the program line number Np is smallerthan the reference number Nr (S13: NO), the control circuit 450 mayperform a boosting PGM with the above-described boosting operation(S14). When the program line number Np is greater than the referencenumber Nr (S13: YES), the control circuit 450 may perform a normal PGMby omitting the boosting operation (S15).

As such, the hot carrier injection HCI as described with reference toFIG. 14 may be prevented by controlling the boosting operation based onthe program line number Np.

Referring to FIGS. 2, 3 and 16 , the nonvolatile memory device 30 mayreceive a programming (PGM) command (S21) and prepare a programoperation. The control circuit 450 of the nonvolatile memory device 30may determine a program line number Np corresponding to a number ofwordlines corresponding to previously-programmed memory cells in aselected stack, a precharge voltage VPC and a first pass voltage VPASS1(S22). The control circuit 450 may control a boosting operation based onthe program line number Np, the precharge voltage VPC and the first passvoltage VPASS1. For example, the control circuit 450 may determinewhether the hot carrier injection HCI occurs based on the program linenumber Np, the precharge voltage VPC and the pass voltage VPASS (S23).When it is determined that the hot carrier injection HCI does not occur(S23: NO), the control circuit 450 may perform a boosting PGM with theabove-described boosting operation (S24). When it is determined that thehot carrier injection HCI occurs (S23: YES), the control circuit 450 maydecrease at least one of the precharge voltage VPC and the first passvoltage VPASS1 (S25), and then, the control circuit 450 may perform theboosting PGM with the above-described boosting operation (S24). Asdescribed with reference to Equation 1, the first boosted voltage VBST1may be decreased by decreasing at least one of the precharge voltage VPCand the first pass voltage VPASS1.

As such, the hot carrier injection HCI as described with reference toFIG. 14 may be prevented by decreasing at least one of the prechargevoltage VPC and the first pass voltage VPASS1 as the program line numberNr increases.

FIG. 17 is a timing diagram illustrating a program operation of a secondstack of a cell string according to the first program scenario of FIG.10 . The precharge period PPC, the first boosting period PBST1, thesecond boosting period PBST2 and the program execution period PEXE arethe same as FIG. 11 , and the repeated descriptions are omitted.

As described with reference to FIGS. 11, 12A and 12B, the channels ofthe erased stack ST1 have the first channel voltage VCH1, and thechannels of the selected stack ST2 have the second channel voltage VCH2that is further boosted. If the channels of the first and second stacksST1 and ST2 are connected electrically to each other, the hot carrierinjection HCI may be caused by the voltage difference between the firstand second channel voltages VCH1 and VCH2.

Referring to FIG. 17 , a recovery operation for initializing voltages ofwordlines may be performed sequentially during a first recovery periodPRCV1 of time interval T5-T6 and a second recovery period PRCV2 of timeinterval T6-T7.

During the first recovery period PRCV1, the voltages of the wordlines ofthe selected stack ST2 may be decreased from the second pass voltageVPASS2 to an intermediate voltage Va lower than the second pass voltageVPASS2 and higher than the initialization voltage Vo. The plurality ofintermediate switching transistors may be turned on after the voltage ofthe wordlines of the selected stack ST2 are decreased to theintermediate voltage Va.

During the second recovery period PRCV2, the voltages of the wordlinesof the erased stack ST1 may be decreased from the first pass voltageVPASS1 to the initialization voltage Vo, and, simultaneously, thevoltages of the wordlines of the selected stack ST2 may be decreasedfrom the intermediate voltage Va to the initialization voltage Vo.

As a result, the channel voltages of the selected stack ST2 may bedecreased firstly during the first recovery period PRCV1, theintermediate switching transistors are turned on to electrically connectthe channels of the selected stack ST2 and the erased stack ST1, andthen the channel voltages of the selected stack ST2 and the erased stackST1 may be decreased secondly during the second recovery period PRCV2.

As such, the hot carrier injection HCI may be prevented by performingthe recovery operation to initialize the wordline voltages of theplurality of stacks ST1 and ST2 by controlling the switching operationof the plurality of intermediate switching transistors.

FIG. 18 is a cross-sectional view illustrating a memory block dividedinto three stacks according to embodiments.

Referring to FIG. 18 , the above-described boundary portion BND mayinclude a lower boundary portion BNDL and an upper boundary portionBNDU. A memory block MB may include a first stack ST1 below the lowerboundary portion BNDL, a second stack ST2 between the lower boundaryportion BNDL and the upper boundary portion BNDU, and a third stack ST3above the upper boundary portion BNDU.

The above-described intermediate switching transistors may include aplurality of lower switching transistors disposed in the lower boundaryportion BNDL and connected to a lower switching line LSL, and aplurality of upper switching transistors disposed in the upper boundaryportion BNDU and connected to an upper switching line USL.

FIGS. 19A and 19B are diagrams illustrating a program operation withrespect to stacks of the memory cell array of FIG. 18 according to thefirst program scenario of FIG. 10 . The repeated descriptions with FIG.11 may be omitted.

FIGS. 19A and 19B illustrate voltages during the above-describedprecharge period PPC, the first boosting period PBST1 and the secondboosting period PBST2.

FIG. 19A corresponds to a case where the program operation is performedto the third stack ST3 according to the above-described first programscenario T2B. In this case, the first stack ST1 and the second stack ST2correspond to the above-describe erased stacks and the third stack ST3corresponds to the above-described selected stack.

During the precharge period PPC and the first boosting period PBST1,turn-on voltages VLON and VUON are applied to the lower switching lineLSL and the upper switching line USL, respectively. During the secondboosting period PBST2, turn-off voltages VLOFF and VUOFF are applied tothe lower switching line LSL and the upper switching line USL,respectively. The other voltages are the same as described withreference to FIG. 11 . Through such control of the switching operationof the intermediate switching transistors MC4 and MC8, the doubleboosting as described above may be implemented with respect to the thirdstack ST3 corresponding to the selected stack.

FIG. 19B corresponds to a case where the program operation is performedto the second stack ST2 according to the above-described first programscenario T2B. In this case, the first stack ST1 corresponds to theabove-describe erased stacks and the second stack ST2 corresponds to theabove-described selected stack.

During the precharge period PPC and the first boosting period PBST1,turn-on voltages VLON and VUON are applied to the lower switching lineLSL and the upper switching line USL, respectively. During the secondboosting period PBST2, turn-off voltages VLOFF and VUOFF are applied tothe lower switching line LSL and the upper switching line USL,respectively. The other voltages are the same as described withreference to FIG. 11 . Through such control of the switching operationof the intermediate switching transistors MC4 and MC8, the doubleboosting as described above may be implemented with respect to thesecond stack ST2 corresponding to the selected stack.

FIG. 20 is a diagram illustrating a second program scenario according toembodiments. The repeated descriptions with FIG. 10 may be omitted.

Referring to FIG. 20 , according to a second program scenario, a programoperation may be performed in an upward direction from a lowestwordline. In other words, as data stored in a memory block increase,data may be filled in erased cells in the upward direction from bottomto top (B2T program order). Non-programmed memory cells MC5-MC12 are inan erased state E0, and each of programmed memory cells MC1-MC4 may bein one of the erased state E0 and programmed states P1, P2 and P3. Forexample, at least one of the memory cells MC2-MC11 may be anintermediate switching transistor.

FIG. 21 is a timing diagram illustrating a program operation of a firststack according to the second program scenario of FIG. 20 . The repeateddescriptions with FIG. 11 may be omitted.

In the case of FIG. 11 , the first stack ST1 corresponds to an erasedstack and the second stack ST2 corresponds to the selected stack. Incontrast, in a case of FIG. 21 , the first stack ST1 corresponds to theselected stack and the second stack ST2 corresponds to the erased stack.

Accordingly, the above-described first boosting operation may beperformed by applying the first pass voltage VPASS1 to the wordlines ofthe second stack ST2, and after the first boosting operation, theabove-described second boosting operation may be performed by applyingthe second pass voltage VPASS2 to the wordlines of the first stack ST1.

In the second program scenario, when the program operation is performedto the first stack ST1 corresponding to the selected stack, apreviously-programmed memory cell may exist between a selected memorycell to be programmed presently and the source line CSL. Therefore,during the precharge period PPC, the precharge voltage VPC may beapplied to the channels of the first stack ST1 and the second stack ST2by applying the precharge voltage VPC to the bitline BL, applying theturn-on voltage VSON to the string selection lines SSLs and SSLu and theturn-on voltage VMON to the intermediate switching line MSL.

FIGS. 22A and 22B are diagrams illustrating embodiments of a memory cellarray included in a nonvolatile memory device according to embodiments.

FIGS. 22A and 22B illustrate structures that both of the bitline BL andthe source line CSL are disposed above the memory cell arrays 700 and800. One cell string is illustrated for convenience of illustration, andeach of the memory cell arrays 700 and 800 may include a plurality ofcell strings of the same configuration. Each cell string may include astring selection transistor SST controlled by a string selection lineSSL, memory cells MC controlled by wordlines WL, an intermediateswitching transistor controlled by an intermediate switching line MSLand a ground selection transistor GST controlled by a ground selectionline GSL.

Referring to FIG. 22A, cell strings may include intermediate switchingtransistors MST disposed in a lowest layer, and a memory cell array 700may be divided into a first sub array 710 and a second sub array 720.

Referring to FIG. 22B, the cell strings may include switchingtransistors MST disposed in a lowest layer and an intermediate layer,and a memory cell array 800 may be divided into a first sub array 810, asecond sub array 820, a third sub array 830 and a fourth sub array 840.

The program voltage disturbance and the pass voltage disturbance may bereduced by applying the above-described double boosting to the subarrays considered as the above-described stacks and thus performance andlifetime of the nonvolatile memory device may be enhanced.

FIG. 23 is a block diagram illustrating a solid state disk or solidstate drive (SSD) according to embodiments.

Referring to FIG. 23 , an SSD 1000 includes multiple nonvolatile memorydevices 1100 and an SSD controller 1200.

The nonvolatile memory devices 1100 may be configured optionally toreceive a high voltage VPP. The nonvolatile memory devices 1100 may bethe above-described nonvolatile memory device 30. The nonvolatile memorydevices 1100 may implement the double boosting as described above bycontrolling the switching operation of the intermediate switchingtransistors based on the program address.

The SSD controller 1200 is connected to the nonvolatile memory devices1100 through multiple channels CH1 to CHi. The SSD controller 1200includes one or more processors 1210, a buffer memory 1220, an errorcorrection code (ECC) circuit 1230, a host interface 1250, and anonvolatile memory interface 1260. The buffer memory 1220 stores dataused to drive the SSD controller 1200. The buffer memory 1220 may bufferdata for the program operation. The ECC circuit 1230 calculates errorcorrection code values of data to be programmed at a writing operationand corrects an error of read data using an error correction code valueat a read operation. In a data recovery operation, The ECC circuit 1230corrects an error of data recovered from the nonvolatile memory devices1100.

FIG. 24 is a cross-sectional view of a nonvolatile memory deviceaccording to example embodiments.

Referring to FIG. 24 , a nonvolatile memory device or a memory device2000 may have a chip-to-chip (C2C) structure. The C2C structure mayrefer to a structure formed by manufacturing an upper chip including amemory cell region or a cell region CELL on a first wafer, manufacturinga lower chip including a peripheral circuit region PERI on a secondwafer, different from the first wafer, and then connecting the upperchip and the lower chip in a bonding manner. For example, the bondingmanner may include a method of electrically connecting a bonding metalformed on an uppermost metal layer of the upper chip and a bonding metalformed on an uppermost metal layer of the lower chip. For example, whenthe bonding metals may be formed of copper (Cu), the bonding manner maybe a Cu—Cu bonding, and the bonding metals may also be formed ofaluminum or tungsten.

Each of the peripheral circuit region PERI and the cell region CELL ofthe memory device 2000 may include an external pad bonding area PA, awordline bonding area WLBA, and a bitline bonding area BLBA.

The peripheral circuit region PERI may include a first substrate 2210,an interlayer insulating layer 2215, a plurality of circuit elements2220 a, 2220 b, and 2220 c formed on the first substrate 2210, firstmetal layers 2230 a, 2230 b, and 2230 c respectively connected to theplurality of circuit elements 2220 a, 2220 b, and 2220 c, and secondmetal layers 2240 a, 2240 b, and 2240 c formed on the first metal layers2230 a, 2230 b, and 2230 c. In an example embodiment, the first metallayers 2230 a, 2230 b, and 2230 c may be formed of tungsten havingrelatively high resistance, and the second metal layers 2240 a, 2240 b,and 2240 c may be formed of copper having relatively low resistance.

In an example embodiment illustrated in FIG. 24 , although the firstmetal layers 2230 a, 2230 b, and 2230 c and the second metal layers 2240a, 2240 b, and 2240 c are shown and described, they are not limitedthereto, and one or more metal layers may be further formed on thesecond metal layers 2240 a, 2240 b, and 2240 c. At least a portion ofthe one or more metal layers formed on the second metal layers 2240 a,2240 b, and 2240 c may be formed of aluminum or the like having a lowerresistance than those of copper forming the second metal layers 2240 a,2240 b, and 2240 c.

The interlayer insulating layer 2215 may be disposed on the firstsubstrate 2210 and cover the plurality of circuit elements 2220 a, 2220b, and 2220 c, the first metal layers 2230 a, 2230 b, and 2230 c, andthe second metal layers 2240 a, 2240 b, and 2240 c. The interlayerinsulating layer 2215 may include an insulating material such as siliconoxide, silicon nitride, or the like.

Lower bonding metals 2271 b and 2272 b may be formed on the second metallayer 2240 b in the wordline bonding area WLBA. In the wordline bondingarea WLBA, the lower bonding metals 2271 b and 2272 b in the peripheralcircuit region PERI may be electrically connected to upper bondingmetals 2371 b and 2372 b in the cell region CELL in a bonding manner,and the lower bonding metals 2271 b and 2272 b and the upper bondingmetals 2371 b and 2372 b may be formed of aluminum, copper, tungsten, orthe like. The upper bonding metals 2371 b and 2372 b in the cell regionCELL may be referred as first metal pads and the lower bonding metals2271 b and 2272 b in the peripheral circuit region PERI may be referredas second metal pads.

The cell region CELL may include at least one memory block. The cellregion CELL may include a second substrate 2310 and a common source line2320. On the second substrate 2310, a plurality of wordlines 2331, 2332,2333, 2334, 2335, 2336, 2337, and 2338 (i.e., 2330) may be stacked in afirst direction D1, perpendicular to an upper surface of the secondsubstrate 2310. At least one string selection line and at least oneground selection line may be arranged on and below the plurality ofwordlines 2330, respectively, and the plurality of wordlines 2330 may bedisposed between the at least one string selection line and the at leastone ground selection line.

In the bitline bonding area BLBA, a channel structure CH correspondingto a plurality of NAND strings may extend in the first direction D1,perpendicular to the upper surface of the second substrate 2310, andpass through the plurality of wordlines 2330, the at least one stringselection line, and the at least one ground selection line. The channelstructure CH may include a data storage layer, a channel layer, a buriedinsulating layer, and the like, and the channel layer may beelectrically connected to a first metal layer 2350 c and a second metallayer 2360 c. For example, the first metal layer 2350 c may be a bitlinecontact, and the second metal layer 2360 c may be a bitline. In anexample embodiment, the bitline 2360 c may extend in a third directionD3, parallel to the upper surface of the second substrate 2310.

In an example embodiment illustrated in FIG. 24 , an area in which thechannel structure CH, the bitline 2360 c, and the like are disposed maybe defined as the bitline bonding area BLBA. In the bitline bonding areaBLBA, the bitline 2360 c may be electrically connected to the circuitelements 2220 c providing a page buffer 2393 in the peripheral circuitregion PERI. For example, the bitline 2360 c may be connected to upperbonding metals 2371 c and 2372 c in the cell region CELL, and the upperbonding metals 2371 c and 2372 c may be connected to lower bondingmetals 2271 c and 2272 c connected to the circuit elements 2220 c of thepage buffer 2393. The upper bonding metals 2371 c and 2372 c may bereferred to as the first bonding metals and the lower bonding metals2271 c and 2272 c may be referred to as the second bonding metals.

In the wordline bonding area WLBA, the plurality of wordlines 2330 mayextend in a second direction D2, parallel to the upper surface of thesecond substrate 2310, and may be connected to a plurality of cellcontact plugs 2341, 2342, 2343, 2344, 2345, 2346, and 2347 (i.e., 2340).The plurality of wordlines 2330 and the plurality of cell contact plugs2340 may be connected to each other in pads provided by at least aportion of the plurality of wordlines 2330 extending in differentlengths in the second direction D2. A first metal layer 2350 b and asecond metal layer 2360 b may be connected to an upper portion of theplurality of cell contact plugs 2340 connected to the plurality ofwordlines 2330, sequentially. The plurality of cell contact plugs 2340may be connected to the circuit region PERI by the upper bonding metals2371 b and 2372 b of the cell region CELL and the lower bonding metals2271 b and 2272 b of the peripheral circuit region PERI in the wordlinebonding area WLBA.

The plurality of cell contact plugs 2340 may be electrically connectedto the circuit elements 2220 b providing a row decoder 2394 in theperipheral circuit region PERI. In an example embodiment, operatingvoltages of the circuit elements 2220 b providing the row decoder 2394may be different than operating voltages of the circuit elements 2220 cproviding the page buffer 2393. For example, operating voltages of thecircuit elements 2220 c providing the page buffer 2393 may be greaterthan operating voltages of the circuit elements 2220 b providing the rowdecoder 2394.

A common source line contact plug 2380 may be disposed in the externalpad bonding area PA. The common source line contact plug 2380 may beformed of a conductive material such as a metal, a metal compound,polysilicon, or the like, and may be electrically connected to thecommon source line 2320. A first metal layer 2350 a and a second metallayer 2360 a may be stacked on an upper portion of the common sourceline contact plug 2380, sequentially. For example, an area in which thecommon source line contact plug 2380, the first metal layer 2350 a, andthe second metal layer 2360 a are disposed may be defined as theexternal pad bonding area PA.

Input/output pads 2205 and 2305 may be disposed in the external padbonding area PA. A lower insulating film 2201 covering a lower surfaceof the first substrate 2210 may be formed below the first substrate2210, and a first input/output pad 2205 may be formed on the lowerinsulating film 2201. The first input/output pad 2205 may be connectedto at least one of the plurality of circuit elements 2220 a, 2220 b, and2220 c disposed in the peripheral circuit region PERI through a firstinput/output contact plug 2203, and may be separated from the firstsubstrate 2210 by the lower insulating film 2201. In addition, a sideinsulating film may be disposed between the first input/output contactplug 2203 and the first substrate 2210 to electrically separate thefirst input/output contact plug 2203 and the first substrate 2210.

An upper insulating film 2301 covering the upper surface of the secondsubstrate 2310 may be formed on the second substrate 2310, and a secondinput/output pad 2305 may be disposed on the upper insulating layer2301. The second input/output pad 2305 may be connected to at least oneof the plurality of circuit elements 2220 a, 2220 b, and 2220 c disposedin the peripheral circuit region PERI through a second input/outputcontact plug 2303.

According to embodiments, the second substrate 2310 and the commonsource line 2320 may not be disposed in an area in which the secondinput/output contact plug 2303 is disposed. Also, the secondinput/output pad 2305 may not overlap the wordlines 2330 in the firstdirection D1. The second input/output contact plug 2303 may be separatedfrom the second substrate 2310 in the direction, parallel to the uppersurface of the second substrate 310, and may pass through the interlayerinsulating layer 2315 of the cell region CELL to be connected to thesecond input/output pad 2305.

According to embodiments, the first input/output pad 2205 and the secondinput/output pad 2305 may be selectively formed. For example, the memorydevice 2000 may include only the first input/output pad 2205 disposed onthe first substrate 2210 or the second input/output pad 2305 disposed onthe second substrate 2310. Alternatively, the memory device 200 mayinclude both the first input/output pad 2205 and the second input/outputpad 2305.

A metal pattern in an uppermost metal layer may be provided as a dummypattern or the uppermost metal layer may be absent, in each of theexternal pad bonding area PA and the bitline bonding area BLBA,respectively included in the cell region CELL and the peripheral circuitregion PERI.

In the external pad bonding area PA, the nonvolatile memory device 2000may include a lower metal pattern 2273 a, corresponding to an uppermetal pattern 2372 a formed in an uppermost metal layer of the cellregion CELL, and having the same shape as the upper metal pattern 2372 aof the cell region CELL, in an uppermost metal layer of the peripheralcircuit region PERI. In the peripheral circuit region PERI, the lowermetal pattern 2273 a formed in the uppermost metal layer of theperipheral circuit region PERI may not be connected to a contact.Similarly, in the external pad bonding area PA, an upper metal pattern,corresponding to the lower metal pattern formed in an uppermost metallayer of the peripheral circuit region PERI, and having the same shapeas a lower metal pattern of the peripheral circuit region PERI, may beformed in an uppermost metal layer of the cell region CELL.

The lower bonding metals 2271 b and 2272 b may be formed on the secondmetal layer 2240 b in the wordline bonding area WLBA. In the wordlinebonding area WLBA, the lower bonding metals 2271 b and 2272 b of theperipheral circuit region PERI may be electrically connected to theupper bonding metals 2371 b and 2372 b of the cell region CELL by aCu—Cu bonding.

Further, the bitline bonding area BLBA, an upper metal pattern 2392,corresponding to a lower metal pattern 2252 formed in the uppermostmetal layer of the peripheral circuit region PERI, and having the sameshape as the lower metal pattern 2252 of the peripheral circuit regionPERI, may be formed in an uppermost metal layer of the cell region CELL.A contact may not be formed on the upper metal pattern 2392 formed inthe uppermost metal layer of the cell region CELL.

In an example embodiment, corresponding to a metal pattern formed in anuppermost metal layer in one of the cell region CELL and the peripheralcircuit region PERI, a reinforcement metal pattern having the same shapeas the metal pattern may be formed in an uppermost metal layer inanother one of the cell region CELL and the peripheral circuit regionPERI, and a contact may not be formed on the reinforcement metalpattern.

As described above, a plurality of intermediate switching transistorsmay be disposed in a boundary portion between two adjacent stacks of amemory block in the vertical direction D1 to perform the method ofprogramming in the nonvolatile memory device 2000. The memory blockincluding the stacks may be formed in the memory cell region CEE, andthe control circuit as described above may be formed in the peripheralcircuit region PERI.

As described above, the nonvolatile memory device and the method ofprogramming in the nonvolatile memory device according to embodimentsmay reduce program voltage disturbance and pass voltage disturbance, andthus, may enhance performance and lifetime of the nonvolatile memorydevice through control of the switching operation of the intermediateswitching transistors to implement double boosting of the channelvoltages.

The present inventive concept may be applied to nonvolatile memorydevices and systems including the nonvolatile memory device. Forexample, the present inventive concept may be applied to systems such asbe a memory card, a solid state drive (SSD), an embedded multimedia card(eMMC), a mobile phone, a smart phone, a personal digital assistant(PDA), a portable multimedia player (PMP), a digital camera, acamcorder, personal computer (PC), a server computer, a workstation, alaptop computer, a digital TV, a set-top box, a portable game console, anavigation system, a wearable device, an internet of things (IoT)device, an internet of everything (IoE) device, an e-book, a virtualreality (VR) device, an augmented reality (AR) device, etc.

The foregoing is illustrative of embodiments and is not to be construedas limiting thereof. Although various embodiments have been described,those skilled in the art will readily appreciate that many modificationsare possible in the embodiments without materially departing from theinventive concept.

What is claimed is:
 1. A method of programming a memory block comprisinga plurality of stacks connected in series in a vertical direction byforming a plurality of cell strings between a plurality of bitlines anda source line, the method comprising: determining, from among theplurality of stacks, a selected stack comprising memory cells to beprogrammed according to a program command, the selected stack beingseparated from an erased stack comprising non-programmed memory cells bya boundary portion comprising a plurality of intermediate switchingtransistors; during a first boosting period, applying a turn-on voltageto gate electrodes of the plurality of intermediate switchingtransistors; during the first boosting period, applying a first passvoltage to wordlines of the erased stack; during a second boostingperiod after the first boosting period, applying a turn-off voltage tothe gate electrodes of the plurality of intermediate switchingtransistors; during the second boosting period, applying a second passvoltage to wordlines of the selected stack; and during a programexecution period after the second boosting period, applying a programvoltage to a selected wordline of the selected stack.
 2. The method ofclaim 1, further comprising: during the first boosting period, applyingan initialization voltage to the wordlines of the selected stack; andduring the second boosting period, maintaining the first pass voltageapplied to the wordlines of the erased stack.
 3. The method of claim 1,further comprising: performing a program scenario such that a programoperation is performed in a downward direction from an uppermostwordline; during a precharge period before the first boosting period,applying a precharge voltage to the source line; and during theprecharge period, applying a turn-on voltage to gate electrodes ofground selection transistors included in the plurality of cell strings.4. The method of claim 1, further comprising: performing a programscenario such that a program operation is performed in an upwarddirection from a lowest wordline; during a precharge period before thefirst boosting period, applying a precharge voltage to the plurality ofbitlines; and during the precharge period, applying a turn-on voltage togate electrodes of string selection transistors included in theplurality of cell strings.
 5. The method of claim 1, further comprising:during the program execution period, applying a program inhibitionvoltage or a program permission voltage to each of the plurality ofbitlines according to program data; during the program execution period,electrically connecting a selected cell string to a correspondingbitline; and during the program execution period, electricallydisconnecting an unselected cell string from a corresponding bitline. 6.The method of claim 1, further comprising: during the first boostingperiod, the second boosting period and the program execution period,electrically disconnecting the plurality of cell strings from the sourceline.
 7. The method of claim 1, further comprising: during a firstrecovery period after the program execution period, decreasing voltagesof the wordlines of the selected stack from the second pass voltage toan intermediate voltage lower than the second pass voltage and higherthan an initialization voltage; and during the first recovery period,turning on the plurality of intermediate switching transistors.
 8. Themethod of claim 7, further comprising: during a second recovery periodafter the first recovery period, decreasing voltages of the wordlines ofthe erased stack from the first pass voltage to the initializationvoltage, and, at a substantially same time, decreasing the voltages ofthe wordlines of the selected stack from the intermediate voltage to theinitialization voltage.
 9. The method of claim 1, wherein the pluralityof stacks comprise a first stack below the boundary portion and a secondstack above the boundary portion.
 10. The method of claim 9, furthercomprising: performing a program scenario such that a program operationis performed in a downward direction from an uppermost wordline, whereinthe first stack corresponds to the erased stack and the second stackcorresponds to the selected stack.
 11. The method of claim 9, furthercomprising: performing a program scenario such that a program operationis performed in an upward direction from a lowest wordline, wherein thefirst stack corresponds to the selected stack and the second stackcorresponds to the erased stack.
 12. The method of claim 1, wherein theboundary portion comprises a lower boundary portion and an upperboundary portion, wherein the plurality of stacks comprise a first stackbelow the lower boundary portion, a second stack between the lowerboundary portion and the upper boundary portion, and a third stack abovethe upper boundary portion, and wherein the plurality of intermediateswitching transistors comprise a plurality of lower switchingtransistors disposed in the lower boundary portion and a plurality ofupper switching transistors disposed in the upper boundary portion. 13.A memory device comprising: a memory block comprising a plurality ofstacks connected in series in a vertical direction by forming aplurality of cell strings between a plurality of bitlines and a sourceline; and a control circuit configured to: determine, from among theplurality of stacks, a selected stack comprising memory cells to beprogrammed according to a program command, the selected stack beingseparated from an erased stack comprising non-programmed memory cells bya boundary portion comprising a plurality of intermediate switchingtransistors; during a first boosting period, apply a turn-on voltage togate electrodes of the plurality of intermediate switching transistors;during the first boosting period, apply a first pass voltage towordlines of the erased stack; during a second boosting period after thefirst boosting period, apply a turn-off voltage to the gate electrodesof the plurality of intermediate switching transistors; during thesecond boosting period, apply a second pass voltage to wordlines of theselected stack; and during a program execution period after the secondboosting period, apply a program voltage to a selected wordline of theselected stack.
 14. The memory device claim 13, wherein the controlcircuit is further configured to: perform a program scenario such that aprogram operation is performed in a downward direction from an uppermostwordline; during a precharge period before the first boosting period,apply a precharge voltage to the source line; and during the prechargeperiod, apply a turn-on voltage to gate electrodes of ground selectiontransistors included in the plurality of cell strings.
 15. The memorydevice of claim 13, wherein the control circuit is further configuredto: during the program execution period, apply a program inhibitionvoltage or a program permission voltage to each of the plurality ofbitlines according to program data; during the program execution period,electrically connect a selected cell string to a corresponding bitline;and during the program execution period, electrically disconnect anunselected cell string from a corresponding bitline.
 16. The memorydevice of claim 13, wherein the control circuit is further configuredto: during the first boosting period, the second boosting period and theprogram execution period, electrically disconnect the plurality of cellstrings from the source line.
 17. The memory device of claim 13, furthercomprising: a memory cell region including a first metal pad; and aperipheral circuit region including a second metal pad and verticallyconnected to the memory cell region by the first metal pad and thesecond metal pad; wherein the memory block is included in the memorycell region and the control circuit is included in the peripheralcircuit region.
 18. A system comprising: a memory device and a memorycontroller configured to control the memory device, the memory devicecomprising: a memory block comprising a plurality of stacks connected inseries in a vertical direction by forming a plurality of cell stringsbetween a plurality of bitlines and a source line; and a control circuitconfigured to: determine, from among the plurality of stacks, a selectedstack comprising memory cells to be programmed according to a programcommand received from the memory controller, the selected stack beingseparated from an erased stack comprising non-programmed memory cells bya boundary portion comprising a plurality of intermediate switchingtransistors; during a first boosting period, apply a turn-on voltage togate electrodes of the plurality of intermediate switching transistors;during the first boosting period, apply a first pass voltage towordlines of the erased stack; during a second boosting period after thefirst boosting period, apply a turn-off voltage to the gate electrodesof the plurality of intermediate switching transistors; during thesecond boosting period, apply a second pass voltage to wordlines of theselected stack; and during a program execution period after the secondboosting period, apply a program voltage to a selected wordline of theselected stack.
 19. The system of claim 18, wherein the control circuitis further configured to: perform a program scenario such that a programoperation is performed in a downward direction from an uppermostwordline; during a precharge period before the first boosting period,apply a precharge voltage to the source line; and during the prechargeperiod, apply a turn-on voltage to gate electrodes of ground selectiontransistors included in the plurality of cell strings.
 20. The system ofclaim 18, wherein the control circuit is further configured to: duringthe program execution period, apply a program inhibition voltage or aprogram permission voltage to each of the plurality of bitlinesaccording to program data; during the program execution period,electrically connect a selected cell string to a corresponding bitline;and during the program execution period, electrically disconnect anunselected cell string from a corresponding bitline.
 21. The system ofclaim 18, wherein the control circuit is further configured to: duringthe first boosting period, the second boosting period and the programexecution period, electrically disconnect the plurality of cell stringsfrom the source line.
 22. The system of claim 18, wherein the memorydevice further comprises: a memory cell region including a first metalpad; and a peripheral circuit region including a second metal pad andvertically connected to the memory cell region by the first metal padand the second metal pad, and wherein the memory block is included inthe memory cell region and the control circuit is included in theperipheral circuit region.